Description
Ion implanter is the key equipment in making integrated circuit. When ion beams being shot onto the surface of semi-conductor and deposited, the carrier concentration and conduction type is changed. Owning to its excellent surface modification, ion impanation is widely applied in semi conducting material, metal, ceramics, high-molecular polymer, etc. Ion implantation is essential in making massive integrated circuit (IC). Tungsten parts are key components in ion source system of semi conductor ion implanter to restrain and shield ionizing ray.
Application
1. They are used in the semiconductor industry.
2. We produce tungsten parts for ion implantation with high density, purity and accuracy and homogenous internal structure.
3. They are suitable for moderate beam current implanter and strong beam current implanter.
4. Tungsten parts for ion implantation from dAchemetal Furnace are made according to the customer drawing.
5. We also make tungsten parts in MOCVD equipments.
Owning lathes, milling machines, EDM and CNC technology, Achemetal Furnace Co., Ltd is a professional manufacturer and supplier of tungsten parts for ion implantation in China. We supply all kinds of tungsten and molybdenum fabricated parts, including TZM and Mo-La alloys with smooth surface, no double skin, no stratification, no crack and no impurity. We specialize in producing tungsten and molybdenum seed holder for crystal growth furnace, tungsten and molybdenum crucible for vacuum coating, tungsten as well as molybdenum connection parts with high purity and excellent mach inability. All of our products are made in accordance with the standard of ISO9001. Above 60% of our tungsten parts for ion implantation are exported to more than ten countries and areas, such as USA, Germany, Japan, Russia, South Korea, etc.
Packaging and Delivery
| Packaging | Wooden case with waterproof paper inner |
| Delivery | 10-25 days (according to your qty) |
Package and Inspection
Achemetal Furnace Co., Ltd owns a complete range of manufacturing equipments. We provide you with test data of surface roughness, density, roughness, ductility, flaw detection, dimensions and so on. We promise our tungsten parts for ion implantation are under process of vacuum annealing furnace, ultrasonic cleaning and vacuum packing before delivery.
